Thermoelastic surface acoustic waves in low-loss silicon nitride integrated circuits
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arXiv
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| Autori principali: | , , , , , |
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| Natura: | Preprint |
| Pubblicazione: |
2026
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| _version_ | 1866908817978032128 |
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| author | Zheng, Zheng Işık, Ahmet Tarık Keloth, Akshay Ye, Kaixuan van der Slot, Peter Marpaung, David |
| author_facet | Zheng, Zheng Işık, Ahmet Tarık Keloth, Akshay Ye, Kaixuan van der Slot, Peter Marpaung, David |
| contents | Acousto-optic modulation in photonic integrated circuits harness the applications that include signal processing, quantum photonics and microwave photonics. However, silicon nitride ($\rm{Si_3N_4}$), as a main-stream low-loss scalable photonic platform, suffers from the lack of piezoelectric effect and therefore the hybrid co-integration with other materials is always required for acousto-optic modulation. Here, we employed thermoelastic surface acoustic waves (SAW) in a 8 dB/m propagation loss $\rm{Si_3N_4}$ integrated circuits without adding extra materials. A phase modulation efficiency enhancement of 13.6 dB is realized with a multi-pass configuration. Furthermore, a single-sideband intermodal scattering with a suppression ratio of 8 dB is measured and an intensity modulation is observed by incorporating the phase modulation into a ring resonator spectral. This thermoelastic SAW technique, as an initial step of acousto-optic modulation in low-loss $\rm{Si_3N_4}$ platform, is promising for integrated microwave photonics and programmable photonics applications. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2602_06732 |
| institution | arXiv |
| publishDate | 2026 |
| record_format | arxiv |
| spellingShingle | Thermoelastic surface acoustic waves in low-loss silicon nitride integrated circuits Zheng, Zheng Işık, Ahmet Tarık Keloth, Akshay Ye, Kaixuan van der Slot, Peter Marpaung, David Optics Acousto-optic modulation in photonic integrated circuits harness the applications that include signal processing, quantum photonics and microwave photonics. However, silicon nitride ($\rm{Si_3N_4}$), as a main-stream low-loss scalable photonic platform, suffers from the lack of piezoelectric effect and therefore the hybrid co-integration with other materials is always required for acousto-optic modulation. Here, we employed thermoelastic surface acoustic waves (SAW) in a 8 dB/m propagation loss $\rm{Si_3N_4}$ integrated circuits without adding extra materials. A phase modulation efficiency enhancement of 13.6 dB is realized with a multi-pass configuration. Furthermore, a single-sideband intermodal scattering with a suppression ratio of 8 dB is measured and an intensity modulation is observed by incorporating the phase modulation into a ring resonator spectral. This thermoelastic SAW technique, as an initial step of acousto-optic modulation in low-loss $\rm{Si_3N_4}$ platform, is promising for integrated microwave photonics and programmable photonics applications. |
| title | Thermoelastic surface acoustic waves in low-loss silicon nitride integrated circuits |
| topic | Optics |
| url | https://arxiv.org/abs/2602.06732 |