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| Main Authors: | , , , , , , , , , , , , , , , , |
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| Format: | Preprint |
| Published: |
2026
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| Subjects: | |
| Online Access: | https://arxiv.org/abs/2602.10941 |
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| _version_ | 1866915792428204032 |
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| author | Xu, Xiang Huang, Hong Huang, Qi Wang, Hao Zhu, Huaze Cao, Junwei Zhu, Zheng Ma, Yaqin Xu, Yiyang Zhang, Zhongfang Chen, Yitong Chen, Ke Jiang, Tong Zhu, Bowen Zhao, Xiaolong Long, Shibing Kong, Wei |
| author_facet | Xu, Xiang Huang, Hong Huang, Qi Wang, Hao Zhu, Huaze Cao, Junwei Zhu, Zheng Ma, Yaqin Xu, Yiyang Zhang, Zhongfang Chen, Yitong Chen, Ke Jiang, Tong Zhu, Bowen Zhao, Xiaolong Long, Shibing Kong, Wei |
| contents | Ultrawide-bandgap semiconductors are attractive for solar-blind ultraviolet (UV) detection owing to their intrinsically low noise and high spectral selectivity, yet their deployment in large-area, high-density electronic imaging systems remains limited by a fundamental trade-off between material quality, device speed, and compatibility with high-density planar silicon readout circuits. Here, we report a membrane-enabled integration platform based on transferable single-crystalline beta-Ga2O3 that overcomes these constraints at the system level. By exploiting the weak interplanar bonding of beta-Ga2O3 (100) plane, we obtain wafer-scale freestanding single-crystalline membranes that enable vertically integrated photodiodes with sub-microsecond, non-persistent photoresponse and high UV-visible rejection. Crucially, we introduce a stitching-based membrane assembly strategy that decouples array resolution from the size of the source single-crystalline substrate, allowing high-resolution photodetector arrays to be integrated onto silicon thin-film-transistor backplanes. The modular assembled active-matrix UV imaging arrays exhibit uniform solar-blind response without image lag, in stark contrast to arrays based on amorphous or polycrystalline films. Beyond beta-Ga2O3, this membrane-enabled and stitching-based modular integration strategy provides a general route toward high-speed, high-resolution electronic imaging systems using transferable single-crystalline semiconductors. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2602_10941 |
| institution | arXiv |
| publishDate | 2026 |
| record_format | arxiv |
| spellingShingle | Scalable Solar-Blind Imaging Enabled by Single-Crystalline Beta-Ga2O3 Membranes on Silicon Backplanes Xu, Xiang Huang, Hong Huang, Qi Wang, Hao Zhu, Huaze Cao, Junwei Zhu, Zheng Ma, Yaqin Xu, Yiyang Zhang, Zhongfang Chen, Yitong Chen, Ke Jiang, Tong Zhu, Bowen Zhao, Xiaolong Long, Shibing Kong, Wei Materials Science Ultrawide-bandgap semiconductors are attractive for solar-blind ultraviolet (UV) detection owing to their intrinsically low noise and high spectral selectivity, yet their deployment in large-area, high-density electronic imaging systems remains limited by a fundamental trade-off between material quality, device speed, and compatibility with high-density planar silicon readout circuits. Here, we report a membrane-enabled integration platform based on transferable single-crystalline beta-Ga2O3 that overcomes these constraints at the system level. By exploiting the weak interplanar bonding of beta-Ga2O3 (100) plane, we obtain wafer-scale freestanding single-crystalline membranes that enable vertically integrated photodiodes with sub-microsecond, non-persistent photoresponse and high UV-visible rejection. Crucially, we introduce a stitching-based membrane assembly strategy that decouples array resolution from the size of the source single-crystalline substrate, allowing high-resolution photodetector arrays to be integrated onto silicon thin-film-transistor backplanes. The modular assembled active-matrix UV imaging arrays exhibit uniform solar-blind response without image lag, in stark contrast to arrays based on amorphous or polycrystalline films. Beyond beta-Ga2O3, this membrane-enabled and stitching-based modular integration strategy provides a general route toward high-speed, high-resolution electronic imaging systems using transferable single-crystalline semiconductors. |
| title | Scalable Solar-Blind Imaging Enabled by Single-Crystalline Beta-Ga2O3 Membranes on Silicon Backplanes |
| topic | Materials Science |
| url | https://arxiv.org/abs/2602.10941 |