Transforming Computational Lithography with AC and AI -- Faster, More Accurate, and Energy-efficient

Fuente: arXiv

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Bibliographic Details
Main Authors:	Mukhopadhyay, Saumyadip, Yang, Kiho, Vasudevan, Kasyap Thottasserymana, Divvela, Mounica Jyothi, Dogru, Selim, Krishnamurthy, Dilip, Treska, Fergo, Gillijns, Werner, Kim, Ryan Ryoung han, Sastry, Kumara, Singh, Vivek
Format:	Preprint
Published:	2026
Subjects:	Signal Processing Artificial Intelligence Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2602.15036