Image de couverture de livre

Transforming Computational Lithography with AC and AI -- Faster, More Accurate, and Energy-efficient

Fuente: arXiv

Enregistré dans:

Détails bibliographiques
Auteurs principaux:	Mukhopadhyay, Saumyadip, Yang, Kiho, Vasudevan, Kasyap Thottasserymana, Divvela, Mounica Jyothi, Dogru, Selim, Krishnamurthy, Dilip, Treska, Fergo, Gillijns, Werner, Kim, Ryan Ryoung han, Sastry, Kumara, Singh, Vivek
Format:	Preprint
Publié:	2026
Sujets:	Signal Processing Artificial Intelligence Applied Physics
Accès en ligne:	Acceder al recurso
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

Documents similaires

Parametric curve-based representation of piecewise linear masks
par: De Gendt, Stefan, et autres
Publié: (2025)

CQSA: Byzantine-robust Clustered Quantum Secure Aggregation in Federated Learning
par: Nath, Arnab, et autres
Publié: (2026)

Context-Augmented Code Generation: How Product Context Improves AI Coding Agent Decision Compliance by 49%
par: Dillon, Drew, et autres
Publié: (2026)

Operator formulation of Classical mechanics: Levi-Civita map and equivalence of central forces in 2-dimensions
par: Puranam, Nikhil Kasyap, et autres
Publié: (2024)

When to sell an indivisible object: Optimal timing with Markovian buyers
par: Yoon, Kiho
Publié: (2021)

Robust double auction mechanisms
par: Yoon, Kiho
Publié: (2021)

Upstream competition and exclusive content provision in media markets
par: Yoon, Kiho
Publié: (2025)

Dynamic mechanism design: An elementary introduction
par: Yoon, Kiho
Publié: (2021)

Uniform price auction with quantity constraints
par: Yoon, Kiho
Publié: (2024)

A Study of the Provincial Road Networks of Canada as Complex Networks
par: Vasudevan, Srivatsan, et autres
Publié: (2025)

Creating Domain-Specific Translation Memories for Machine Translation Fine-tuning: The TRENCARD Bilingual Cardiology Corpus
par: Dogru, Gokhan
Publié: (2024)

A preliminary study on nickel tolerance of some barley genotypes
par: Ali Doğru
Publié: (2022)

Faster rate of Hawking radiation in modified gravity constraining dark matter
par: Dey, Panchajanya, et autres
Publié: (2024)

An MCDM Application for Cost Effective and Sustainable Production Recipe Selection: The Case of Ceramic Tile Production
par: Atasever Doğru, Burçin
Publié: (2024)

Robust Mixture Regression Based on the Skew t Distribution
par: Fatma Zehra Doğru
Publié: (2017)

Uniform quasi-multiplicativity of locally constant cocycles and applications
par: Mohammadpour, Reza, et autres
Publié: (2022)

Aggregation of the Constitutively Active K296E Rhodopsin Mutant Contributes to Retinal Degeneration
par: Sreelakshmi Vasudevan, et autres
Publié: (2025)

Variations in the epithelial cords of the ovaries of a microchiropteran bat, Hipposideros speoris (Schneider) during reproductive cycle: An enzymic approach
par: Sastry, S.
Publié: (2013)

STARQA: A Question Answering Dataset for Complex Analytical Reasoning over Structured Databases
par: Maddela, Mounica, et autres
Publié: (2025)

우나무노를 통해서 아는 초월적 통각에 대한 통찰
par: han, jingang
Publié: (2026)

wong-han/PaperOPINN: PaperOPINN
par: wong-han
Publié: (2026)

wong-han/PaperOPINN: Full Code Uploaded
par: wong-han
Publié: (2026)

Observer-Resolved Event Accumulation: A Measurement-Grounded Reformulation of Time
par: han, yumi
Publié: (2026)

A Framework for Secure Ownership Verification and Tamper Detection Using AI-Powered Watermarking
par: Kumara,Yapa, Kumara,Yapa
Publié: (2025)

On Better Approximation Order for the Nonlinear q-Bernstein Operator of Maximum Product Kind
par: Çit, Sezin, et autres
Publié: (2024)

On Better Approximation Order for the Max-Product Meyer-König and Zeller Operator
par: Dogru, Sezin Çit Ogun
Publié: (2023)

Improvements on the Leighton‐type oscillation criteria for impulsive differential equations and extension to non‐canonical case
par: A. Zafer, et autres
Publié: (2024)

Adaptive Caching for Faster Video Generation with Diffusion Transformers
par: Kahatapitiya, Kumara, et autres
Publié: (2024)

Design and Characterization of Decellularized Caprine Liver Matrix Constructs for Liver Tissue Engineering
par: Supriya Bhatt, et autres
Publié: (2025)

Agenity_Paper6A_Agent_Identity_Gate
par: Chirravuri, Sastry
Publié: (2026)

Analysis of LLMs Against Prompt Injection and Jailbreak Attacks
par: Jaiswal, Piyush, et autres
Publié: (2026)

Fairness-Constrained Optimization Attack in Federated Learning
par: Kasyap, Harsh, et autres
Publié: (2025)

Achieving Faster and More Accurate Operation of Deep Predictive Learning
par: Yoshikawa, Masaki, et autres
Publié: (2024)

Development of Faster and More Accurate Supernova Localization at Super-Kamiokande
par: Abe, K., et autres
Publié: (2026)

Accurate Prediction of HOMO–LUMO Gap Using DFT Functional and Application to Next‐Generation Organic Telluro[n]Helicenes Materials
par: Rahul Kumar, et autres
Publié: (2025)

The microstructural evolution of material extrusion based additive manufacturing of polyetheretherketone under different printing conditions and application in a spinal implant
par: Alaeddin Burak Irez, et autres
Publié: (2024)

AI agents may be worth the hype but not the resources (yet): An initial exploration of machine translation quality and costs in three language pairs in the legal and news domains
par: Iglesias, Vicent Briva, et autres
Publié: (2025)

PhononBench
par: han, xiao-qi
Publié: (2026)

Information retrieval from Euclidean path integral
par: Yeom, Dong-han
Publié: (2024)

Effects of Motivation on Reading Performance Among Han and Tibetan EFL Learners: The Mediating Role of Reading Strategies
par: Tsung‐han Weng
Publié: (2025)