PRISM: Photonics-Informed Inverse Lithography for Manufacturable Inverse-Designed Photonic Integrated Circuits

Fuente: arXiv

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Bibliographic Details
Main Authors:	Zhou, Hongjian, Yang, Haoyu, Gangi, Nicholas, Xu, Tianle, Huang, Rena, Gu, Jiaqi
Format:	Preprint
Published:	2026
Subjects:	Optics Emerging Technologies
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2602.15762