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Main Authors: Klein, C., Cohen, S., Descamps, T., Iovan, A., Zolotov, P., Vennéguès, P., Florea, I., Semond, F., Zwiller, V.
Format: Preprint
Published: 2026
Subjects:
Online Access:https://arxiv.org/abs/2602.15948
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author Klein, C.
Cohen, S.
Descamps, T.
Iovan, A.
Zolotov, P.
Vennéguès, P.
Florea, I.
Semond, F.
Zwiller, V.
author_facet Klein, C.
Cohen, S.
Descamps, T.
Iovan, A.
Zolotov, P.
Vennéguès, P.
Florea, I.
Semond, F.
Zwiller, V.
contents Niobium Titanium nitride (NbTiN) based superconducting nanowire single photon detectors (SNSPDs) are known for their high performance across a wide spectral range, from the X-ray to the mid-infrared. Nonetheless, fabrication challenges and performance degradation attributable to surface oxidation and lack of uniformity in films thinner than 5 nm remain a significant barrier for achieving high-quality detectors. In this work, we study the influence of a Silicon capping layer on film properties and on the performance of SNSPDs. A Silicon capping layer effectively suppresses oxidation and increases the superconducting transition temperature. This enables superconductivity in films as thin as 3 nm at 3 K, increases critical current in patterned nanowires and significantly extends the saturation plateau from the visible to the near infrared (up to 2050 nm): These detectors maintain sub-50 ps timing jitter, even for nanowires as wide as 250 nm and with detection areas of 20x20μm2. Our results establish that thinner films protected by a capping layer allow for the fabrication of wider wires, decreasing nanofabrication challenges and extending the operating temperature range for efficient single photon detection.
format Preprint
id arxiv_https___arxiv_org_abs_2602_15948
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Enhanced Superconducting Nanowire Single Photon Detector Performances using Silicon Capping
Klein, C.
Cohen, S.
Descamps, T.
Iovan, A.
Zolotov, P.
Vennéguès, P.
Florea, I.
Semond, F.
Zwiller, V.
Quantum Physics
Niobium Titanium nitride (NbTiN) based superconducting nanowire single photon detectors (SNSPDs) are known for their high performance across a wide spectral range, from the X-ray to the mid-infrared. Nonetheless, fabrication challenges and performance degradation attributable to surface oxidation and lack of uniformity in films thinner than 5 nm remain a significant barrier for achieving high-quality detectors. In this work, we study the influence of a Silicon capping layer on film properties and on the performance of SNSPDs. A Silicon capping layer effectively suppresses oxidation and increases the superconducting transition temperature. This enables superconductivity in films as thin as 3 nm at 3 K, increases critical current in patterned nanowires and significantly extends the saturation plateau from the visible to the near infrared (up to 2050 nm): These detectors maintain sub-50 ps timing jitter, even for nanowires as wide as 250 nm and with detection areas of 20x20μm2. Our results establish that thinner films protected by a capping layer allow for the fabrication of wider wires, decreasing nanofabrication challenges and extending the operating temperature range for efficient single photon detection.
title Enhanced Superconducting Nanowire Single Photon Detector Performances using Silicon Capping
topic Quantum Physics
url https://arxiv.org/abs/2602.15948