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| Autori principali: | , , , |
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| Natura: | Preprint |
| Pubblicazione: |
2026
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| Accesso online: | https://arxiv.org/abs/2602.16102 |
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| _version_ | 1866914336209895424 |
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| author | Anderson, Ian Posadas, Agham Demkov, Alexander A. Lu, Ruochen |
| author_facet | Anderson, Ian Posadas, Agham Demkov, Alexander A. Lu, Ruochen |
| contents | The increasing development of wireless communication bands has motivated the development of compact, low-loss, and frequency adjustable RF filtering technologies. Acoustic resonators are the ideal solution to these requirements, and tunable implementations offer a path toward reconfigurable front ends. In this work, we investigate epitaxial barium titanate (BTO) grown on silicon as a platform for tunable acoustic resonators operating in the sub-GHz regime. We demonstrate lateral excitation of symmetric lamb (S0) modes in X-cut BTO membranes, in contrast to prior thickness-defined ferroelectric resonators. Devices are designed using finite-element simulations and fabricated with laterally patterned electrodes that enable overtone coupling to multiple resonant modes. Under applied DC bias, ferroelectric domains align, allowing electrical excitation, frequency tuning, and quality-factor enhancement of acoustic modes. Resonances near 300 MHz and 700 MHz exhibit electromechanical coupling up to 8% and bias-dependent frequency tuning, with a distinct transition in behavior near 20 V. These results highlight monolithic BTO on silicon as a promising material system for laterally excited, tunable acoustic resonators for reconfigurable RF applications. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2602_16102 |
| institution | arXiv |
| publishDate | 2026 |
| record_format | arxiv |
| spellingShingle | Tunable Ferroelectric Acoustic Resonators in Monolithic Thin-Film Barium Titanate Anderson, Ian Posadas, Agham Demkov, Alexander A. Lu, Ruochen Systems and Control The increasing development of wireless communication bands has motivated the development of compact, low-loss, and frequency adjustable RF filtering technologies. Acoustic resonators are the ideal solution to these requirements, and tunable implementations offer a path toward reconfigurable front ends. In this work, we investigate epitaxial barium titanate (BTO) grown on silicon as a platform for tunable acoustic resonators operating in the sub-GHz regime. We demonstrate lateral excitation of symmetric lamb (S0) modes in X-cut BTO membranes, in contrast to prior thickness-defined ferroelectric resonators. Devices are designed using finite-element simulations and fabricated with laterally patterned electrodes that enable overtone coupling to multiple resonant modes. Under applied DC bias, ferroelectric domains align, allowing electrical excitation, frequency tuning, and quality-factor enhancement of acoustic modes. Resonances near 300 MHz and 700 MHz exhibit electromechanical coupling up to 8% and bias-dependent frequency tuning, with a distinct transition in behavior near 20 V. These results highlight monolithic BTO on silicon as a promising material system for laterally excited, tunable acoustic resonators for reconfigurable RF applications. |
| title | Tunable Ferroelectric Acoustic Resonators in Monolithic Thin-Film Barium Titanate |
| topic | Systems and Control |
| url | https://arxiv.org/abs/2602.16102 |