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Autori principali: Anderson, Ian, Posadas, Agham, Demkov, Alexander A., Lu, Ruochen
Natura: Preprint
Pubblicazione: 2026
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Accesso online:https://arxiv.org/abs/2602.16102
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author Anderson, Ian
Posadas, Agham
Demkov, Alexander A.
Lu, Ruochen
author_facet Anderson, Ian
Posadas, Agham
Demkov, Alexander A.
Lu, Ruochen
contents The increasing development of wireless communication bands has motivated the development of compact, low-loss, and frequency adjustable RF filtering technologies. Acoustic resonators are the ideal solution to these requirements, and tunable implementations offer a path toward reconfigurable front ends. In this work, we investigate epitaxial barium titanate (BTO) grown on silicon as a platform for tunable acoustic resonators operating in the sub-GHz regime. We demonstrate lateral excitation of symmetric lamb (S0) modes in X-cut BTO membranes, in contrast to prior thickness-defined ferroelectric resonators. Devices are designed using finite-element simulations and fabricated with laterally patterned electrodes that enable overtone coupling to multiple resonant modes. Under applied DC bias, ferroelectric domains align, allowing electrical excitation, frequency tuning, and quality-factor enhancement of acoustic modes. Resonances near 300 MHz and 700 MHz exhibit electromechanical coupling up to 8% and bias-dependent frequency tuning, with a distinct transition in behavior near 20 V. These results highlight monolithic BTO on silicon as a promising material system for laterally excited, tunable acoustic resonators for reconfigurable RF applications.
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publishDate 2026
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spellingShingle Tunable Ferroelectric Acoustic Resonators in Monolithic Thin-Film Barium Titanate
Anderson, Ian
Posadas, Agham
Demkov, Alexander A.
Lu, Ruochen
Systems and Control
The increasing development of wireless communication bands has motivated the development of compact, low-loss, and frequency adjustable RF filtering technologies. Acoustic resonators are the ideal solution to these requirements, and tunable implementations offer a path toward reconfigurable front ends. In this work, we investigate epitaxial barium titanate (BTO) grown on silicon as a platform for tunable acoustic resonators operating in the sub-GHz regime. We demonstrate lateral excitation of symmetric lamb (S0) modes in X-cut BTO membranes, in contrast to prior thickness-defined ferroelectric resonators. Devices are designed using finite-element simulations and fabricated with laterally patterned electrodes that enable overtone coupling to multiple resonant modes. Under applied DC bias, ferroelectric domains align, allowing electrical excitation, frequency tuning, and quality-factor enhancement of acoustic modes. Resonances near 300 MHz and 700 MHz exhibit electromechanical coupling up to 8% and bias-dependent frequency tuning, with a distinct transition in behavior near 20 V. These results highlight monolithic BTO on silicon as a promising material system for laterally excited, tunable acoustic resonators for reconfigurable RF applications.
title Tunable Ferroelectric Acoustic Resonators in Monolithic Thin-Film Barium Titanate
topic Systems and Control
url https://arxiv.org/abs/2602.16102