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Piezoelectric MEMS Phase Modulator for Silicon Nitride Platform in the Visible Spectrum

Fuente: arXiv

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Bibliographic Details
Main Authors:	Dullo, Firehun T., Thrane, Paul C., Jayakumar, Nikhil, Skokic, Zeljko, Dirdal, Christopher A., Gjessing, Jo, Ahluwalia, Balpreet S.
Format:	Preprint
Published:	2026
Subjects:	Optics Applied Physics
Online Access:	Acceder al recurso
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