Graphene FET Process and Analysis Optimization in 200 mm Pilot Line Environment

Fuente: arXiv

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Bibliographic Details
Main Authors:	Murros, Anton, Soikkeli, Miika, Virta, Anni, Maestre, Arantxa, Morillo, Leire, Centeno, Alba, Zurutuza, Amaia, Kilpi, Olli-Pekka
Format:	Preprint
Published:	2026
Subjects:	Mesoscale and Nanoscale Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2602.17135