Graphene FET Process and Analysis Optimization in 200 mm Pilot Line Environment
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arXiv
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| Main Authors: | Murros, Anton, Soikkeli, Miika, Virta, Anni, Maestre, Arantxa, Morillo, Leire, Centeno, Alba, Zurutuza, Amaia, Kilpi, Olli-Pekka |
|---|---|
| Format: | Preprint |
| Published: |
2026
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| Subjects: | |
| Online Access: | |
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