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Effect of oxygen content on optical, structural, and dielectric properties of Al$_x$Ta$_y$O$_z$$ thin films

Fuente: arXiv

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Bibliographic Details
Main Authors:	Ondračka, Pavel, Drevet, Richard, Franta, Daniel, Dvořák, Jan, Ohlídal, Ivan, Vašina, Petr
Format:	Preprint
Published:	2026
Subjects:	Materials Science
Online Access:	Acceder al recurso
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