Tuning of Atomic Layer Deposition Pulse Time through Physics-Informed Bayesian Active Learning

Fuente: arXiv

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Bibliographic Details
Main Authors:	Navabi, Pouyan, Takoudis, Christos G.
Format:	Preprint
Published:	2026
Subjects:	Materials Science Mesoscale and Nanoscale Physics Chemical Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2602.18565