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Pushing the Limits of Inverse Lithography with Generative Reinforcement Learning

Fuente: arXiv

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Dettagli Bibliografici
Autori principali:	Yang, Haoyu, Ren, Haoxing
Natura:	Preprint
Pubblicazione:	2026
Soggetti:	Machine Learning Artificial Intelligence None B.7.2
Accesso online:	Acceder al recurso
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