Demonstration of High-Performance Ultra-Wide Bandgap SrSnO$_3$ Top-Gated MOSFETs

Fuente: arXiv
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Main Authors: Koo, Junghyun, Sun, Weideng, Kim, Donghwan, Lee, Hongseung, Zhu, Chengyu, Lee, Kiyoung, Bae, Hagyoul, Jalan, Bharat, Qiu, Gang
Format: Preprint
Published: 2026
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author Koo, Junghyun
Sun, Weideng
Kim, Donghwan
Lee, Hongseung
Zhu, Chengyu
Lee, Kiyoung
Bae, Hagyoul
Jalan, Bharat
Qiu, Gang
author_facet Koo, Junghyun
Sun, Weideng
Kim, Donghwan
Lee, Hongseung
Zhu, Chengyu
Lee, Kiyoung
Bae, Hagyoul
Jalan, Bharat
Qiu, Gang
contents We report the demonstration of high-performance top-gated metal-oxide-semiconductor field-effect transistors (MOSFETs) based on the ultra-wide bandgap perovskite oxide SrSnO$_3$ (SSO). Using hybrid molecular beam epitaxy-grown SSO channels and ALD-deposited HfO$_2$ gate dielectrics, the devices exhibit field-effect mobility exceeding 65 cm$^2$/V$\cdot$s, an on-state current up to 194 mA/mm, an on/off current ratio above $10^8$, and a contact resistance of 0.66 $Ω\cdot$mm. The devices also show a near-ideal subthreshold slope of 68 mV/dec and negligible hysteresis, indicating a high-quality dielectric/semiconductor interface. These results establish SrSnO$_3$ as a promising ultra-wide bandgap oxide semiconductor platform for high-performance power electronic applications.
format Preprint
id arxiv_https___arxiv_org_abs_2602_20385
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Demonstration of High-Performance Ultra-Wide Bandgap SrSnO$_3$ Top-Gated MOSFETs
Koo, Junghyun
Sun, Weideng
Kim, Donghwan
Lee, Hongseung
Zhu, Chengyu
Lee, Kiyoung
Bae, Hagyoul
Jalan, Bharat
Qiu, Gang
Materials Science
We report the demonstration of high-performance top-gated metal-oxide-semiconductor field-effect transistors (MOSFETs) based on the ultra-wide bandgap perovskite oxide SrSnO$_3$ (SSO). Using hybrid molecular beam epitaxy-grown SSO channels and ALD-deposited HfO$_2$ gate dielectrics, the devices exhibit field-effect mobility exceeding 65 cm$^2$/V$\cdot$s, an on-state current up to 194 mA/mm, an on/off current ratio above $10^8$, and a contact resistance of 0.66 $Ω\cdot$mm. The devices also show a near-ideal subthreshold slope of 68 mV/dec and negligible hysteresis, indicating a high-quality dielectric/semiconductor interface. These results establish SrSnO$_3$ as a promising ultra-wide bandgap oxide semiconductor platform for high-performance power electronic applications.
title Demonstration of High-Performance Ultra-Wide Bandgap SrSnO$_3$ Top-Gated MOSFETs
topic Materials Science
url https://arxiv.org/abs/2602.20385