Interpretable self-driving sputter epitaxy: from black-box optimization to human-usable growth rules

Fuente: arXiv

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Bibliographic Details
Main Authors:	Wakabayashi, Yuki K., Ogawa, Yui, Romero, Franz Benedict, Otsuka, Takuma, Taniyasu, Yoshitaka
Format:	Preprint
Published:	2026
Subjects:	Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2602.22531