SPM-Bench: Benchmarking Large Language Models for Scanning Probe Microscopy
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arXiv
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| Main Authors: | Xiao, Peiyao, Li, Xiaogang, Gao, Xinyi, Xu, Chengliang, Wang, Ben, Chen, Zichao, Wang, Zeyu, Qu, Lin, Zhao, Bing, Wei, Hu |
|---|---|
| Format: | Preprint |
| Published: |
2026
|
| Subjects: | |
| Online Access: | |
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