Optimizing CMOS-compatible, superconducting Titanium Nitride Resonators: Deposition Conditions and Structuring Processes

Fuente: arXiv

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Bibliographic Details
Main Authors:	Lang, Simon J. K., Schewski, Alexandra, Eisele, Ignaz, Weber, Johannes, Moran-Guizan, Carla, Lou, Zhen, Singer, Moritz, Schoof, Benedikt, Tornow, Marc, Mayer, Thomas, Zahn, Daniela, Pereira, Rui N., Kutter, Christoph
Format:	Preprint
Published:	2026
Subjects:	Quantum Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2603.00441