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High-Stress Si3N4 Reflective Membranes Monolithically Integrated with Cavity Bragg Mirrors

Fuente: arXiv

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Bibliographic Details
Main Authors:	Khokhar, Megha, Norder, Lucas, Sberna, Paolo M., Norte, Richard A.
Format:	Preprint
Published:	2026
Subjects:	Optics Mesoscale and Nanoscale Physics Materials Science Applied Physics Quantum Physics
Online Access:	Acceder al recurso
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