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Study on the Effect of Annealing on Ga$_2$O$_3$ Thin Films Deposited on Silicon by RF Sputtering

Fuente: arXiv

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Bibliographic Details
Main Authors:	Sousa, Ana Sofia, Esteves, Duarte M., Robalo, Tiago T., Rodrigues, Mário S., Lorenz, Katharina, Peres, Marco
Format:	Preprint
Published:	2026
Subjects:	Materials Science Mesoscale and Nanoscale Physics
Online Access:	Acceder al recurso
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