High Thermal Conductivity in Back-End-of-Line Compatible AlN Thin Films

Fuente: arXiv

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Bibliographic Details
Main Authors:	Guo, Xufei, Chen, Zirou, Huang, Zifeng, Wang, Yuxiang, Liu, Jinwen, Cheng, Zhe
Format:	Preprint
Published:	2026
Subjects:	Materials Science Mesoscale and Nanoscale Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2603.07115