Anisotropic implantation damage build-up and crystal recovery in $β$-Ga$_2$O$_3$

Fuente: arXiv

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Bibliographic Details
Main Authors:	Esteves, Duarte Magalhães, Magalhães, Sérgio, da Costa, Ângelo Rafael Granadeiro, Lorenz, Katharina, Peres, Marco
Format:	Preprint
Published:	2026
Subjects:	Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2603.08534