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Hauptverfasser: Yoo, Jae Hyuck, Ray, Nathan J., Johnson, Mike A., Nguyen, Hoang T., Feigenbaum, Eyal
Format: Preprint
Veröffentlicht: 2026
Schlagworte:
Online-Zugang:https://arxiv.org/abs/2603.08673
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author Yoo, Jae Hyuck
Ray, Nathan J.
Johnson, Mike A.
Nguyen, Hoang T.
Feigenbaum, Eyal
author_facet Yoo, Jae Hyuck
Ray, Nathan J.
Johnson, Mike A.
Nguyen, Hoang T.
Feigenbaum, Eyal
contents Optical metasurfaces, comprised of subwavelength nanostructures, hold a great promise to high-power laser optics but also a limited pertinence due to their currently limited aperture size, throughput and durability. Here, an alternative approach is presented, reliant on laser-controlled self-organizing mask formation followed by ion etching which results in an all-fused-silica-glass metasurface. Two 1 mm diameter optical elements (an axicon lens and a shadower) are fabricated and their optical performance is validated at 532 nm wavelength with an extremely low broadband reflection (<0.15%) - a result of the unique metasurface elements shape. The self-organizing working principle enables producing large amounts of nano-elements at-once, thus a path for aperture scaleup. It also enables generation of sub-100 nm nanoelements, thus a path to short wavelengths operation. Two key advancements towards viability are presented: a laser scan with in-situ transmission feedback enables patterning the etching mask to a prescribed nanoparticle distribution, and a crafted beyond-mask-erosion-point etching of the mask enables increasing the metasurface phase difference to at least pi, while keeping extremely low reflection across it. This paves a path to high-power lasers optics, requiring large aperture, high throughput and laser light durability.
format Preprint
id arxiv_https___arxiv_org_abs_2603_08673
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Low Reflectance All-Glass Metasurface Lenses Based on Laser Self-generated Nanoparticles
Yoo, Jae Hyuck
Ray, Nathan J.
Johnson, Mike A.
Nguyen, Hoang T.
Feigenbaum, Eyal
Optics
Optical metasurfaces, comprised of subwavelength nanostructures, hold a great promise to high-power laser optics but also a limited pertinence due to their currently limited aperture size, throughput and durability. Here, an alternative approach is presented, reliant on laser-controlled self-organizing mask formation followed by ion etching which results in an all-fused-silica-glass metasurface. Two 1 mm diameter optical elements (an axicon lens and a shadower) are fabricated and their optical performance is validated at 532 nm wavelength with an extremely low broadband reflection (<0.15%) - a result of the unique metasurface elements shape. The self-organizing working principle enables producing large amounts of nano-elements at-once, thus a path for aperture scaleup. It also enables generation of sub-100 nm nanoelements, thus a path to short wavelengths operation. Two key advancements towards viability are presented: a laser scan with in-situ transmission feedback enables patterning the etching mask to a prescribed nanoparticle distribution, and a crafted beyond-mask-erosion-point etching of the mask enables increasing the metasurface phase difference to at least pi, while keeping extremely low reflection across it. This paves a path to high-power lasers optics, requiring large aperture, high throughput and laser light durability.
title Low Reflectance All-Glass Metasurface Lenses Based on Laser Self-generated Nanoparticles
topic Optics
url https://arxiv.org/abs/2603.08673