Nonlinear Mode Coupling in Silicon Nitride Membrane Resonators

Fuente: arXiv
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Autori principali: Das, Soumya Kanti, Arora, Nishta, S, Hridhay A, Naik, Akshay, Samanta, Chandan
Natura: Preprint
Pubblicazione: 2026
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author Das, Soumya Kanti
Arora, Nishta
S, Hridhay A
Naik, Akshay
Samanta, Chandan
author_facet Das, Soumya Kanti
Arora, Nishta
S, Hridhay A
Naik, Akshay
Samanta, Chandan
contents Nonlinear interactions between vibrational modes play a crucial role in understanding the dynamical response of nanomechanical resonators. Here, we report the experimental observation and theoretical modeling of nonlinear mode coupling in a high-stress square silicon nitride membrane resonator. We quantify frequency shifts of the fundamental mode arising from tension-mediated geometric nonlinearity by increasing the amplitude of the fundamental mode and higher-order flexural modes. A quantitative theoretical framework based on Kirchhoff-Love plate theory is developed, which incorporates both intrinsic Duffing nonlinearity and nonlinear intermodal coupling and shows good agreement with experimental measurements for the (1,1)-(2,1) and (1,1)-(2,2) mode pairs. We further compute the nonlinear coupling matrix across mode families, revealing the role of mode symmetry and spatial overlap in governing intermodal interactions. These results establish nonlinear mode coupling as a controllable resource for multimode frequency tuning and mechanical transduction.
format Preprint
id arxiv_https___arxiv_org_abs_2603_08689
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Nonlinear Mode Coupling in Silicon Nitride Membrane Resonators
Das, Soumya Kanti
Arora, Nishta
S, Hridhay A
Naik, Akshay
Samanta, Chandan
Mesoscale and Nanoscale Physics
Applied Physics
Optics
Nonlinear interactions between vibrational modes play a crucial role in understanding the dynamical response of nanomechanical resonators. Here, we report the experimental observation and theoretical modeling of nonlinear mode coupling in a high-stress square silicon nitride membrane resonator. We quantify frequency shifts of the fundamental mode arising from tension-mediated geometric nonlinearity by increasing the amplitude of the fundamental mode and higher-order flexural modes. A quantitative theoretical framework based on Kirchhoff-Love plate theory is developed, which incorporates both intrinsic Duffing nonlinearity and nonlinear intermodal coupling and shows good agreement with experimental measurements for the (1,1)-(2,1) and (1,1)-(2,2) mode pairs. We further compute the nonlinear coupling matrix across mode families, revealing the role of mode symmetry and spatial overlap in governing intermodal interactions. These results establish nonlinear mode coupling as a controllable resource for multimode frequency tuning and mechanical transduction.
title Nonlinear Mode Coupling in Silicon Nitride Membrane Resonators
topic Mesoscale and Nanoscale Physics
Applied Physics
Optics
url https://arxiv.org/abs/2603.08689