RF magnetron sputtering deposition of multilayers optical filters for ultra-broadband applications with a large number of thin layers

Fuente: arXiv

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Bibliographic Details
Main Authors:	Duris, Maxime, Horcholle, Bryan, Frilay, Cédric, Labbe, C., Portier, Xavier, Marie, Philippe, Duprey, Sylvain, Lemarié, Franck, Cardin, Julien
Format:	Preprint
Published:	2026
Subjects:	Materials Science Computational Physics Optics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2603.12814