Evaluation of polymer-metal-hybrid bonded wafer-stacks and sensor wafers for ultra-thin hybrid silicon detectors

Fuente: arXiv

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Bibliographic Details
Main Authors:	Vischer, Janna Zoe, Dieter, Yannick, Dingfelder, Jochen, Fritzsch, Thomas, Hügging, Fabian, Kröninger, Kevin, Mucha, Maximilian, Schüssler, Matthias, Weingarten, Jens
Format:	Preprint
Published:	2026
Subjects:	Instrumentation and Detectors
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2603.13992