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Physics-Informed Neural Systems for the Simulation of EUV Electromagnetic Wave Diffraction from a Lithography Mask

Fuente: arXiv

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Bibliographic Details
Main Authors:	Es'kin, Vasiliy A., Ivanov, Egor V.
Format:	Preprint
Published:	2026
Subjects:	Machine Learning Artificial Intelligence Applied Physics Computational Physics Optics
Online Access:	Acceder al recurso
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