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A Novel Approach for Fault Detection and Failure Analysis of CMOS Copper Metal Stacks

Fuente: arXiv

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Bibliographic Details
Main Authors:	Eberwein, Gregor Hieronymus, Rinella, Gianluca Aglieri, Bortoletto, Daniela, Bugiel, Szymon, Carnesecchi, Francesca, Di Mauro, Antonello, Leitao, Pedro Vicente, Hillemanns, Hartmut, Imhoff, Marc Alain, Junique, Antoine, Kluge, Alex, Mager, Magnus, Martinengo, Paolo, Panasenko, Iaroslav, Ravasenga, Ivan, Reidt, Felix, Sarritzu, Valerio, Snoeys, Walter, Šuljić, Miljenko
Format:	Preprint
Published:	2026
Subjects:	Instrumentation and Detectors
Online Access:	Acceder al recurso
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