Single-Crystal AlN Wafer-Based Bulk Acoustic Resonators for Piezoelectric Power Conversion

Fuente: arXiv

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Bibliographic Details
Main Authors:	Yao, Ziqian, Daniel, Clarissa, Pan, Kaicheng, Hsu, Tzu-Hsuan, Chang, Heather, Goorsky, Mark S, Rivas-Davila, Juan, Lu, Ruochen
Format:	Preprint
Published:	2026
Subjects:	Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2603.19409