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Single-Crystal AlN Wafer-Based Bulk Acoustic Resonators for Piezoelectric Power Conversion

Fuente: arXiv

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Détails bibliographiques
Auteurs principaux:	Yao, Ziqian, Daniel, Clarissa, Pan, Kaicheng, Hsu, Tzu-Hsuan, Chang, Heather, Goorsky, Mark S, Rivas-Davila, Juan, Lu, Ruochen
Format:	Preprint
Publié:	2026
Sujets:	Applied Physics
Accès en ligne:	Acceder al recurso
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