Maskless Electron Beam-Induced Etching of Diamond in Air: A Secondary Electron-Driven Mechanism

Fuente: arXiv

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Bibliographic Details
Main Authors:	Tran, Duc-Duy, Mannequin, Cedric, Donatini, Fabrice, Sasaki, Masahiro, Gheeraert, Etienne
Format:	Preprint
Published:	2026
Subjects:	Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2603.28180