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Maskless Electron Beam-Induced Etching of Diamond in Air: A Secondary Electron-Driven Mechanism

Fuente: arXiv

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Détails bibliographiques
Auteurs principaux:	Tran, Duc-Duy, Mannequin, Cedric, Donatini, Fabrice, Sasaki, Masahiro, Gheeraert, Etienne
Format:	Preprint
Publié:	2026
Sujets:	Materials Science
Accès en ligne:	Acceder al recurso
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

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