Microwave Performance of all MOCVD-grown AlScN/GaN MIS-HEMTs on Semi-Insulating GaN Substrates

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Main Authors: Cao, Can, Vangipuram, Vijay Gopal Thirupakuzi, Mukit, Abdul, Helli, Motahareh, Hwang, Jinwoo, Zhao, Hongping, Lu, Wu
Format: Preprint
Published: 2026
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author Cao, Can
Vangipuram, Vijay Gopal Thirupakuzi
Mukit, Abdul
Helli, Motahareh
Hwang, Jinwoo
Zhao, Hongping
Lu, Wu
author_facet Cao, Can
Vangipuram, Vijay Gopal Thirupakuzi
Mukit, Abdul
Helli, Motahareh
Hwang, Jinwoo
Zhao, Hongping
Lu, Wu
contents We report on the design, fabrication, and characterization of all MOCVD-grown long-gate AlScN/GaN metal-insulator-semiconductor high electron mobility transistors (MIS-HEMTs) on semi-insulating GaN substrates. Devices with a gate length of $1~μ$m and gate-drain spacing of $0.9~μ$ m exhibit a maximum drain current density of 1 A/mm, an on/off current ratio of $2\times 10^5$, and a three-terminal breakdown voltage of 63 V. The device has near-ideal subthreshold characteristics with a subthreshold swing of 63 mV/dec and a current dispersion as low as 7.8$\%$ at 10 V due to the excellent interfacial quality with a trap density ($D_\mathrm{it}$) of $2.11\times{10}^{11}~\mathrm{cm}^{-2}eV^{-1}$ and the semi-insulating GaN substrate with a low threading dislocation density. Small-signal RF measurements reveal an $f_\mathrm{T}/f_\mathrm{max}$ of 25.8/51.1 GHz, while large-signal load-pull characterization at 10 GHz demonstrates an output power density of 4.04 W/mm with a power-added efficiency of 22.7$\%$. In addition, a minimum noise figure below 2.5 dB was measured over a wide drain current range from 100 mA/mm to 700 mA/mm below 6 GHz. These results extend previous demonstrations of short-gate MOCVD-grown AlScN/GaN HEMTs to the long-gate, high-voltage regime, confirming the robustness of this material system for both high-frequency and high-power device applications with favorable microwave noise performance.
format Preprint
id arxiv_https___arxiv_org_abs_2604_03485
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Microwave Performance of all MOCVD-grown AlScN/GaN MIS-HEMTs on Semi-Insulating GaN Substrates
Cao, Can
Vangipuram, Vijay Gopal Thirupakuzi
Mukit, Abdul
Helli, Motahareh
Hwang, Jinwoo
Zhao, Hongping
Lu, Wu
Applied Physics
We report on the design, fabrication, and characterization of all MOCVD-grown long-gate AlScN/GaN metal-insulator-semiconductor high electron mobility transistors (MIS-HEMTs) on semi-insulating GaN substrates. Devices with a gate length of $1~μ$m and gate-drain spacing of $0.9~μ$ m exhibit a maximum drain current density of 1 A/mm, an on/off current ratio of $2\times 10^5$, and a three-terminal breakdown voltage of 63 V. The device has near-ideal subthreshold characteristics with a subthreshold swing of 63 mV/dec and a current dispersion as low as 7.8$\%$ at 10 V due to the excellent interfacial quality with a trap density ($D_\mathrm{it}$) of $2.11\times{10}^{11}~\mathrm{cm}^{-2}eV^{-1}$ and the semi-insulating GaN substrate with a low threading dislocation density. Small-signal RF measurements reveal an $f_\mathrm{T}/f_\mathrm{max}$ of 25.8/51.1 GHz, while large-signal load-pull characterization at 10 GHz demonstrates an output power density of 4.04 W/mm with a power-added efficiency of 22.7$\%$. In addition, a minimum noise figure below 2.5 dB was measured over a wide drain current range from 100 mA/mm to 700 mA/mm below 6 GHz. These results extend previous demonstrations of short-gate MOCVD-grown AlScN/GaN HEMTs to the long-gate, high-voltage regime, confirming the robustness of this material system for both high-frequency and high-power device applications with favorable microwave noise performance.
title Microwave Performance of all MOCVD-grown AlScN/GaN MIS-HEMTs on Semi-Insulating GaN Substrates
topic Applied Physics
url https://arxiv.org/abs/2604.03485