Ion-neutral and neutral-neutral scattering in argon at KeV energies and implications for high-aspect-ratio etching
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arXiv
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| Format: | Preprint |
| Published: |
2026
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| _version_ | 1866913016515133440 |
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| author | Khrabrov, Alexander V. Kaganovich, Igor D. |
| author_facet | Khrabrov, Alexander V. Kaganovich, Igor D. |
| contents | In this study, we report a physical model and a Monte Carlo simulation scheme developed to predict the angular distributions of energetic argon atoms and ions as an ion beam passes through a gas-filled volume. The study explores charge-exchange neutralization as a method for generating fast neutral beams suitable for low-damage, high aspect ratio (HAR) etching. The proposed model and simulation code are straightforward and compact, potentially making them useful tools for prototyping. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2604_04214 |
| institution | arXiv |
| publishDate | 2026 |
| record_format | arxiv |
| spellingShingle | Ion-neutral and neutral-neutral scattering in argon at KeV energies and implications for high-aspect-ratio etching Khrabrov, Alexander V. Kaganovich, Igor D. Plasma Physics In this study, we report a physical model and a Monte Carlo simulation scheme developed to predict the angular distributions of energetic argon atoms and ions as an ion beam passes through a gas-filled volume. The study explores charge-exchange neutralization as a method for generating fast neutral beams suitable for low-damage, high aspect ratio (HAR) etching. The proposed model and simulation code are straightforward and compact, potentially making them useful tools for prototyping. |
| title | Ion-neutral and neutral-neutral scattering in argon at KeV energies and implications for high-aspect-ratio etching |
| topic | Plasma Physics |
| url | https://arxiv.org/abs/2604.04214 |