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Autores principales: Tang, Jingyu, Tseng, Po-Sen, Jiang, Kunyao, Kurchin, Rachel C., Davis, Robert F., Porter, Lisa M.
Formato: Preprint
Publicado: 2026
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Acceso en línea:https://arxiv.org/abs/2604.04318
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_version_ 1866913007118843904
author Tang, Jingyu
Tseng, Po-Sen
Jiang, Kunyao
Kurchin, Rachel C.
Davis, Robert F.
Porter, Lisa M.
author_facet Tang, Jingyu
Tseng, Po-Sen
Jiang, Kunyao
Kurchin, Rachel C.
Davis, Robert F.
Porter, Lisa M.
contents The kinetics of the $κ$ to $β$-Ga$_2$O$_3$ phase transformation were investigated in five batches of nominally phase-pure $κ$-Ga2O3 thin films heteroepitaxially grown on c-plane sapphire, with film thickness ranging from 700 to 1100 nm, using in-situ high-temperature X-ray diffraction. Phase fractions were quantitatively extracted through modified Rietveld refinement that accounts for preferred orientation, and the transformation kinetics were analyzed using the Johnson-Mehl-Avrami-Kolmogorov (JMAK) model. The applicability of the JMAK model to thin-film materials was evaluated and its lower and upper bounds for thin films and bulk materials were established. Based on this analysis, a method specifically suited for thin-film kinetic studies was developed and yielded reproducible and robust results across all five sample batches. The results indicate that the $κ$ to $β$ phase transformation in ~700-1100 nm films is best described as an interface-controlled, site-saturated nucleation with thickness-limited or effectively two-dimensional growth.
format Preprint
id arxiv_https___arxiv_org_abs_2604_04318
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Kinetics studies on $κ$ to $β$-Ga$_2$O$_3$ phase transformations via in-situ high temperature X-ray diffraction
Tang, Jingyu
Tseng, Po-Sen
Jiang, Kunyao
Kurchin, Rachel C.
Davis, Robert F.
Porter, Lisa M.
Materials Science
The kinetics of the $κ$ to $β$-Ga$_2$O$_3$ phase transformation were investigated in five batches of nominally phase-pure $κ$-Ga2O3 thin films heteroepitaxially grown on c-plane sapphire, with film thickness ranging from 700 to 1100 nm, using in-situ high-temperature X-ray diffraction. Phase fractions were quantitatively extracted through modified Rietveld refinement that accounts for preferred orientation, and the transformation kinetics were analyzed using the Johnson-Mehl-Avrami-Kolmogorov (JMAK) model. The applicability of the JMAK model to thin-film materials was evaluated and its lower and upper bounds for thin films and bulk materials were established. Based on this analysis, a method specifically suited for thin-film kinetic studies was developed and yielded reproducible and robust results across all five sample batches. The results indicate that the $κ$ to $β$ phase transformation in ~700-1100 nm films is best described as an interface-controlled, site-saturated nucleation with thickness-limited or effectively two-dimensional growth.
title Kinetics studies on $κ$ to $β$-Ga$_2$O$_3$ phase transformations via in-situ high temperature X-ray diffraction
topic Materials Science
url https://arxiv.org/abs/2604.04318