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Auteurs principaux: Senhorst, Sander, Witte, Stefan, Coene, Wim
Format: Preprint
Publié: 2026
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Accès en ligne:https://arxiv.org/abs/2604.05989
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author Senhorst, Sander
Witte, Stefan
Coene, Wim
author_facet Senhorst, Sander
Witte, Stefan
Coene, Wim
contents Ptychographic reconstructions in reflection geometries are commonly interpreted with the same two-dimensional thin-sample model used in transmission, yet the validity of this approximation has not been established. We develop a three-dimensional weak-scattering description of reflection ptychography and derive explicit thickness criteria for when a two-dimensional model remains accurate. Because the sampled axial spatial frequency range is dominated by the rotation of the Ewald sphere rather than its curvature, reflection geometries impose far stricter thin-sample conditions than transmission geometries. The allowable thickness is reduced by one to two orders of magnitude for a representative extreme ultraviolet geometry, depending on the tolerance for appearance of artifacts. Simulations verify that conventional two-dimensional reconstructions may exhibit the thickness-dependent artifacts as predicted by the theory, with particularly strong distortions near specular Bragg minima. We further show that incorporating the correct depth-dependent propagation into the forward model resolves these distortions and enables recovery of sample thickness. These results establish practical validity limits for two-dimensional reflection ptychography and identify a path toward quantitative depth-sensitive reconstructions at all geometries.
format Preprint
id arxiv_https___arxiv_org_abs_2604_05989
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle The 2D approximation quickly breaks down in reflection ptychography
Senhorst, Sander
Witte, Stefan
Coene, Wim
Optics
Ptychographic reconstructions in reflection geometries are commonly interpreted with the same two-dimensional thin-sample model used in transmission, yet the validity of this approximation has not been established. We develop a three-dimensional weak-scattering description of reflection ptychography and derive explicit thickness criteria for when a two-dimensional model remains accurate. Because the sampled axial spatial frequency range is dominated by the rotation of the Ewald sphere rather than its curvature, reflection geometries impose far stricter thin-sample conditions than transmission geometries. The allowable thickness is reduced by one to two orders of magnitude for a representative extreme ultraviolet geometry, depending on the tolerance for appearance of artifacts. Simulations verify that conventional two-dimensional reconstructions may exhibit the thickness-dependent artifacts as predicted by the theory, with particularly strong distortions near specular Bragg minima. We further show that incorporating the correct depth-dependent propagation into the forward model resolves these distortions and enables recovery of sample thickness. These results establish practical validity limits for two-dimensional reflection ptychography and identify a path toward quantitative depth-sensitive reconstructions at all geometries.
title The 2D approximation quickly breaks down in reflection ptychography
topic Optics
url https://arxiv.org/abs/2604.05989