Resist-free shadow deposition using silicon trenches for Josephson junctions in superconducting qubits

Fuente: arXiv

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Bibliographic Details
Main Authors:	Banerjee, Tathagata, Funni, Stephen Daniel, Roy, Saswata, Cha, Judy J., Fatemi, Valla
Format:	Preprint
Published:	2026
Subjects:	Quantum Physics Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2604.09796