ALD W-Doped SnO$_2$ TFTs for Indium-Free BEOL Electronics

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Bibliographic Details
Main Authors:	Patil, Mansi Anil, Dhoble, Devarshi, Kubakaddi, Shivaram, Raturi, Mamta, Villena, Marco A, Thareja, Gaurav, Lodha, Saurabh
Format:	Preprint
Published:	2026
Subjects:	Applied Physics Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2604.11333