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Building reliable 3D photonic integrated circuits and cavities at the wafer scale

Fuente: arXiv

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Bibliographic Details
Main Authors:	Huang, Yuhao, Fu, Yunqi, Xia, Yu, Li, Yuemin, Li, Zheng, Huang, Yaoran, Geng, Zhaoting, Liu, Mingfei, Xiang, Chao
Format:	Preprint
Published:	2026
Subjects:	Optics
Online Access:	Acceder al recurso
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