Cryogenic Loss Limits in Microwave Epitaxial AlN Acoustic Resonators
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| Main Authors: | , , , , , , , , |
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| Format: | Preprint |
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2026
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| _version_ | 1866910130175475712 |
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| author | Gulupalli, Hemant Choudhury, Navnil Xie, Jiacheng Wu, Yufeng Xing, Huili Grace Tang, Hong X. Jena, Debdeep Basu, Kanad Zhao, Wenwen |
| author_facet | Gulupalli, Hemant Choudhury, Navnil Xie, Jiacheng Wu, Yufeng Xing, Huili Grace Tang, Hong X. Jena, Debdeep Basu, Kanad Zhao, Wenwen |
| contents | Aluminum nitride (AlN)-based thin-film bulk acoustic wave resonators (FBARs) are promising compact platforms for 6G communications and quantum memory hardware, enabled by their integrable acoustic modes with high quality factors. However, temperature-dependent acoustic dissipation ultimately limits device performance. In this work, we fabricated a 16 GHz epitaxial AlN FBAR as a test platform, performed small-signal RF measurements from 6.5 K to 300 K, and developed a physics-based model to estimate the fundamental quality-factor limits of FBARs to cryogenic temperatures. The proposed model incorporates both intrinsic and extrinsic loss mechanisms, including an analytical anchor-radiation loss model for bulk acoustic wave resonators, rather than relying solely on finite-element simulations. Measured loaded quality factor (Q) decreases monotonically with temperature, from Qmax of approximately 1589 (Qf=24.79 THz) at 6.5 K to 363 at 294K (Qf=5.66 THz). This trend is consistent with the theoretical limit based on the resonator geometry and the chosen Metal-Insulator-Metal (MIM) stack. To demonstrate the generality of the physics-based framework, we further validate it by benchmarking against a 23 GHz high-overtone bulk acoustic resonator (HBAR) using previously reported data. The validated model provides a practical, transferable framework to interpret Q(T) limits in low-loss resonators by quantifying the temperature-dependent mechanisms that constrain Q, enabling the design of cryogenic microwave filter elements for superconducting quantum hardware. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2604_13364 |
| institution | arXiv |
| publishDate | 2026 |
| record_format | arxiv |
| spellingShingle | Cryogenic Loss Limits in Microwave Epitaxial AlN Acoustic Resonators Gulupalli, Hemant Choudhury, Navnil Xie, Jiacheng Wu, Yufeng Xing, Huili Grace Tang, Hong X. Jena, Debdeep Basu, Kanad Zhao, Wenwen Mesoscale and Nanoscale Physics Applied Physics Aluminum nitride (AlN)-based thin-film bulk acoustic wave resonators (FBARs) are promising compact platforms for 6G communications and quantum memory hardware, enabled by their integrable acoustic modes with high quality factors. However, temperature-dependent acoustic dissipation ultimately limits device performance. In this work, we fabricated a 16 GHz epitaxial AlN FBAR as a test platform, performed small-signal RF measurements from 6.5 K to 300 K, and developed a physics-based model to estimate the fundamental quality-factor limits of FBARs to cryogenic temperatures. The proposed model incorporates both intrinsic and extrinsic loss mechanisms, including an analytical anchor-radiation loss model for bulk acoustic wave resonators, rather than relying solely on finite-element simulations. Measured loaded quality factor (Q) decreases monotonically with temperature, from Qmax of approximately 1589 (Qf=24.79 THz) at 6.5 K to 363 at 294K (Qf=5.66 THz). This trend is consistent with the theoretical limit based on the resonator geometry and the chosen Metal-Insulator-Metal (MIM) stack. To demonstrate the generality of the physics-based framework, we further validate it by benchmarking against a 23 GHz high-overtone bulk acoustic resonator (HBAR) using previously reported data. The validated model provides a practical, transferable framework to interpret Q(T) limits in low-loss resonators by quantifying the temperature-dependent mechanisms that constrain Q, enabling the design of cryogenic microwave filter elements for superconducting quantum hardware. |
| title | Cryogenic Loss Limits in Microwave Epitaxial AlN Acoustic Resonators |
| topic | Mesoscale and Nanoscale Physics Applied Physics |
| url | https://arxiv.org/abs/2604.13364 |