Direct laser micromachining of superconducting terahertz Josephson plasma emitters

Fuente: arXiv
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Main Authors: Yamaguchi, Reo, Sakurai, Takuma, Yamaki, Kazuhiro, Irie, Akinobu, Kato, Junichiro, Nishio, Taichiro, Ishida, Shigeyuki, Eisaki, Hiroshi, Tsujimoto, Manabu
Format: Preprint
Published: 2026
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author Yamaguchi, Reo
Sakurai, Takuma
Yamaki, Kazuhiro
Irie, Akinobu
Kato, Junichiro
Nishio, Taichiro
Ishida, Shigeyuki
Eisaki, Hiroshi
Tsujimoto, Manabu
author_facet Yamaguchi, Reo
Sakurai, Takuma
Yamaki, Kazuhiro
Irie, Akinobu
Kato, Junichiro
Nishio, Taichiro
Ishida, Shigeyuki
Eisaki, Hiroshi
Tsujimoto, Manabu
contents We demonstrate a rapid, maskless fabrication method for superconducting terahertz Josephson plasma emitters (JPEs) based on direct ultraviolet laser micromachining of Bi$_2$Sr$_2$CaCu$_2$O$_{8+δ}$ (Bi-2212) single crystals. Although machining debris is formed near the processed regions, uniform stacks of intrinsic Josephson junctions are preserved inside the crystal, enabling stable terahertz emission. Devices fabricated with Ag, Cu, and Cr electrodes all exhibited terahertz radiation, with Cu electrodes showing performance comparable to Ag while offering a low-cost alternative. Spectroscopic and polarization analyses indicate that the emitted radiation is elliptically polarized and dominated by the geometrical cavity resonance mode. Structural and electrical characterizations reveal that the machining width and depth are not limited by the optical spot size but are governed by the anisotropic thermal conductivity of Bi-2212, consistent with a thermally dominated laser ablation process. This direct laser micromachining approach provides a fast and versatile fabrication technique for JPEs and is broadly applicable to superconducting electronics and terahertz devices.
format Preprint
id arxiv_https___arxiv_org_abs_2604_14485
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Direct laser micromachining of superconducting terahertz Josephson plasma emitters
Yamaguchi, Reo
Sakurai, Takuma
Yamaki, Kazuhiro
Irie, Akinobu
Kato, Junichiro
Nishio, Taichiro
Ishida, Shigeyuki
Eisaki, Hiroshi
Tsujimoto, Manabu
Superconductivity
Applied Physics
We demonstrate a rapid, maskless fabrication method for superconducting terahertz Josephson plasma emitters (JPEs) based on direct ultraviolet laser micromachining of Bi$_2$Sr$_2$CaCu$_2$O$_{8+δ}$ (Bi-2212) single crystals. Although machining debris is formed near the processed regions, uniform stacks of intrinsic Josephson junctions are preserved inside the crystal, enabling stable terahertz emission. Devices fabricated with Ag, Cu, and Cr electrodes all exhibited terahertz radiation, with Cu electrodes showing performance comparable to Ag while offering a low-cost alternative. Spectroscopic and polarization analyses indicate that the emitted radiation is elliptically polarized and dominated by the geometrical cavity resonance mode. Structural and electrical characterizations reveal that the machining width and depth are not limited by the optical spot size but are governed by the anisotropic thermal conductivity of Bi-2212, consistent with a thermally dominated laser ablation process. This direct laser micromachining approach provides a fast and versatile fabrication technique for JPEs and is broadly applicable to superconducting electronics and terahertz devices.
title Direct laser micromachining of superconducting terahertz Josephson plasma emitters
topic Superconductivity
Applied Physics
url https://arxiv.org/abs/2604.14485