High-yield fabrication of micromirror templates via feedback-controlled laser ablation
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arXiv
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| Auteurs principaux: | , , , |
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| Format: | Preprint |
| Publié: |
2026
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| _version_ | 1866915942239305728 |
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| author | Allepuz-Requena, Daniel Neergard-Nielsen, Jonas Schou Huck, Alexander Andersen, Ulrik Lund |
| author_facet | Allepuz-Requena, Daniel Neergard-Nielsen, Jonas Schou Huck, Alexander Andersen, Ulrik Lund |
| contents | We present a high-yield method for fabricating concave micromirror templates in silica using feedback-controlled CO2 laser ablation with precise in situ positioning. Real-time monitoring of the white-light emission generated during ablation is used to terminate laser exposure, thereby reducing shot-to-shot variability in mirror depth and radius of curvature. To ensure reproducible single-shot processing across different substrates, the sample position relative to the laser focus is calibrated using an in situ phase-scanning interferometric microscope integrated into the fabrication workflow. The method enables reliable fabrication of shallow mirror templates with tunable radii of curvature spanning from approximately 20$\mathrm{μm}$ to several hundred micrometers, with relative geometric variances as low as 3%. The suitability of the fabricated mirrors for optical resonators is verified by realizing a compact plano-concave Fabry--Perot microcavity with a finesse of 37000 at telecom wavelengths. The setup provides a simple and automated route to reproducible micromirror fabrication for applications in cavity quantum electrodynamics and cavity optomechanics. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2604_16150 |
| institution | arXiv |
| publishDate | 2026 |
| record_format | arxiv |
| spellingShingle | High-yield fabrication of micromirror templates via feedback-controlled laser ablation Allepuz-Requena, Daniel Neergard-Nielsen, Jonas Schou Huck, Alexander Andersen, Ulrik Lund Optics Instrumentation and Detectors We present a high-yield method for fabricating concave micromirror templates in silica using feedback-controlled CO2 laser ablation with precise in situ positioning. Real-time monitoring of the white-light emission generated during ablation is used to terminate laser exposure, thereby reducing shot-to-shot variability in mirror depth and radius of curvature. To ensure reproducible single-shot processing across different substrates, the sample position relative to the laser focus is calibrated using an in situ phase-scanning interferometric microscope integrated into the fabrication workflow. The method enables reliable fabrication of shallow mirror templates with tunable radii of curvature spanning from approximately 20$\mathrm{μm}$ to several hundred micrometers, with relative geometric variances as low as 3%. The suitability of the fabricated mirrors for optical resonators is verified by realizing a compact plano-concave Fabry--Perot microcavity with a finesse of 37000 at telecom wavelengths. The setup provides a simple and automated route to reproducible micromirror fabrication for applications in cavity quantum electrodynamics and cavity optomechanics. |
| title | High-yield fabrication of micromirror templates via feedback-controlled laser ablation |
| topic | Optics Instrumentation and Detectors |
| url | https://arxiv.org/abs/2604.16150 |