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| Main Authors: | , , , , , , , , , , , , , , |
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| Format: | Preprint |
| Published: |
2026
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| Subjects: | |
| Online Access: | https://arxiv.org/abs/2604.22086 |
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| _version_ | 1866911619849650176 |
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| author | Bhatia, Ekta Du, Yingge Koirala, Krishna P Kow, Chung Liu, Mingzhao Macy, Juan Nanayakkara, Tharanga R. Ponce, Francisco Rao, Satyavolu S. Papa Rebar, Drew J. Sushko, Peter V. VanDevender, Brent A Wang, Chongmin Warner, Marvin G. Xiao, Zhihao |
| author_facet | Bhatia, Ekta Du, Yingge Koirala, Krishna P Kow, Chung Liu, Mingzhao Macy, Juan Nanayakkara, Tharanga R. Ponce, Francisco Rao, Satyavolu S. Papa Rebar, Drew J. Sushko, Peter V. VanDevender, Brent A Wang, Chongmin Warner, Marvin G. Xiao, Zhihao |
| contents | Surface oxides contribute to losses in superconducting transmon devices resulting in degraded performance. We explore the use of the damascene process to replace the sidewall native oxide of a device with a metal/substrate interface. We simulate sidewall oxidation by burying an oxide layer during fabrication. We observe a modest improvement between the two types of devices, which is suggestive of a reduction in the surface participation ratio. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2604_22086 |
| institution | arXiv |
| publishDate | 2026 |
| record_format | arxiv |
| spellingShingle | Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes Bhatia, Ekta Du, Yingge Koirala, Krishna P Kow, Chung Liu, Mingzhao Macy, Juan Nanayakkara, Tharanga R. Ponce, Francisco Rao, Satyavolu S. Papa Rebar, Drew J. Sushko, Peter V. VanDevender, Brent A Wang, Chongmin Warner, Marvin G. Xiao, Zhihao Quantum Physics Materials Science Surface oxides contribute to losses in superconducting transmon devices resulting in degraded performance. We explore the use of the damascene process to replace the sidewall native oxide of a device with a metal/substrate interface. We simulate sidewall oxidation by burying an oxide layer during fabrication. We observe a modest improvement between the two types of devices, which is suggestive of a reduction in the surface participation ratio. |
| title | Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes |
| topic | Quantum Physics Materials Science |
| url | https://arxiv.org/abs/2604.22086 |