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Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes

Fuente: arXiv

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Bibliographic Details
Main Authors:	Bhatia, Ekta, Du, Yingge, Koirala, Krishna P, Kow, Chung, Liu, Mingzhao, Macy, Juan, Nanayakkara, Tharanga R., Ponce, Francisco, Rao, Satyavolu S. Papa, Rebar, Drew J., Sushko, Peter V., VanDevender, Brent A, Wang, Chongmin, Warner, Marvin G., Xiao, Zhihao
Format:	Preprint
Published:	2026
Subjects:	Quantum Physics Materials Science
Online Access:	Acceder al recurso
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