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Evidence of Micron-Scale Ion Damage in (010), (110), and (011) $β-Ga_2O_3$ Epitaxial Layers

Fuente: arXiv

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Bibliographic Details
Main Authors:	Peterson, Carl, Saha, Chinmoy Nath, Liu, Yizheng, Speck, James S., Krishnamoorthy, Sriram
Format:	Preprint
Published:	2026
Subjects:	Applied Physics Materials Science
Online Access:	Acceder al recurso
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