Complementary-polarity double-layer LiTaO3 resonators for symmetry-selective SH2 excitation with ultrahigh electromechanical coupling (kt^2 = 25.7%)

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Main Authors: Yan, Hao, Qin, Zhen-hui, Wang, Zhi-Wen, Wu, Shu-Mao, Hao, Chen-Bei, Chen, Hua-Yang, Liang, Sheng-Nan, Chen, Ke, Yu, Si-Yuan, Chen, Yan-Feng
Format: Preprint
Published: 2026
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author Yan, Hao
Qin, Zhen-hui
Wang, Zhi-Wen
Wu, Shu-Mao
Hao, Chen-Bei
Chen, Hua-Yang
Liang, Sheng-Nan
Chen, Ke
Yu, Si-Yuan
Chen, Yan-Feng
author_facet Yan, Hao
Qin, Zhen-hui
Wang, Zhi-Wen
Wu, Shu-Mao
Hao, Chen-Bei
Chen, Hua-Yang
Liang, Sheng-Nan
Chen, Ke
Yu, Si-Yuan
Chen, Yan-Feng
contents We report a structurally simple double-layer lithium tantalate (LiTaO3) bulk acoustic resonator that enables symmetry-selective excitation of the second-order thickness-shear (SH2) mode with ultrahigh electromechanical coupling. Two 31 deg Y-oriented single-crystal LiTaO3 films are rotation-bonded with complementary polarization (+X/-X) and driven by a longitudinal electric field. Matching between the effective piezoelectric symmetry and the SH2 mode yields an effective electromechanical coupling coefficient of kt^2 = 25.7% at 5.24 MHz. To our knowledge, this is the highest kt^2 reported for a LiTaO3 resonator architecture to date. The measured response is dominated by the target SH2 mode, with only weak parasitic features in the operating band. The structure is also tunable: the resonance frequency and coupling can be adjusted through geometric parameters while maintaining stable modal behavior, indicating good process tolerance. Finite-element analysis further suggests straightforward frequency scaling beyond 5 GHz by reducing the film and electrode thickness while preserving approximately 25% kt^2. In addition, introducing a SiO2 compensation layer is predicted to improve the temperature coefficient of frequency to approximately -25 ppm/deg C. These results establish complementary-polarity double-layer LiTaO3 as a practical platform for high-coupling, spurious-suppressed acoustic resonators and provide a scalable route toward wideband ultrasonic resonators, filters, and related transducers.
format Preprint
id arxiv_https___arxiv_org_abs_2604_24309
institution arXiv
publishDate 2026
record_format arxiv
spellingShingle Complementary-polarity double-layer LiTaO3 resonators for symmetry-selective SH2 excitation with ultrahigh electromechanical coupling (kt^2 = 25.7%)
Yan, Hao
Qin, Zhen-hui
Wang, Zhi-Wen
Wu, Shu-Mao
Hao, Chen-Bei
Chen, Hua-Yang
Liang, Sheng-Nan
Chen, Ke
Yu, Si-Yuan
Chen, Yan-Feng
Applied Physics
Materials Science
We report a structurally simple double-layer lithium tantalate (LiTaO3) bulk acoustic resonator that enables symmetry-selective excitation of the second-order thickness-shear (SH2) mode with ultrahigh electromechanical coupling. Two 31 deg Y-oriented single-crystal LiTaO3 films are rotation-bonded with complementary polarization (+X/-X) and driven by a longitudinal electric field. Matching between the effective piezoelectric symmetry and the SH2 mode yields an effective electromechanical coupling coefficient of kt^2 = 25.7% at 5.24 MHz. To our knowledge, this is the highest kt^2 reported for a LiTaO3 resonator architecture to date. The measured response is dominated by the target SH2 mode, with only weak parasitic features in the operating band. The structure is also tunable: the resonance frequency and coupling can be adjusted through geometric parameters while maintaining stable modal behavior, indicating good process tolerance. Finite-element analysis further suggests straightforward frequency scaling beyond 5 GHz by reducing the film and electrode thickness while preserving approximately 25% kt^2. In addition, introducing a SiO2 compensation layer is predicted to improve the temperature coefficient of frequency to approximately -25 ppm/deg C. These results establish complementary-polarity double-layer LiTaO3 as a practical platform for high-coupling, spurious-suppressed acoustic resonators and provide a scalable route toward wideband ultrasonic resonators, filters, and related transducers.
title Complementary-polarity double-layer LiTaO3 resonators for symmetry-selective SH2 excitation with ultrahigh electromechanical coupling (kt^2 = 25.7%)
topic Applied Physics
Materials Science
url https://arxiv.org/abs/2604.24309