Xu, K., & Lian, Z. (2026). WaferSAGE: Large Language Model-Powered Wafer Defect Analysis via Synthetic Data Generation and Rubric-Guided Reinforcement Learning.
Chicago Style (17th ed.) CitationXu, Ke, and Zhongyuan Lian. WaferSAGE: Large Language Model-Powered Wafer Defect Analysis via Synthetic Data Generation and Rubric-Guided Reinforcement Learning. 2026.
MLA (9th ed.) CitationXu, Ke, and Zhongyuan Lian. WaferSAGE: Large Language Model-Powered Wafer Defect Analysis via Synthetic Data Generation and Rubric-Guided Reinforcement Learning. 2026.
Warning: These citations may not always be 100% accurate.