An Unsupervised Machine Learning-based Framework for Wafer Scale Variability Analysis and Performance Prediction of Ferroelectric Hf0.5Zr0.5O2 Thin Film Capacitors
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arXiv
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| Main Authors: | Anu, Anika, Majumdar, Sayani |
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| Format: | Preprint |
| Published: |
2026
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