Full-chip CMP modelling based on Fully Convolutional Network leveraging White Light Interferometry

Fuente: arXiv

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Bibliographic Details
Main Authors:	Exbrayat, Jules, Bouis, Renan, Sezestre, Elie, Balan, Viorel, Cornelis, Arnaud, Hebras, Damien, Euvrard, Catherine
Format:	Preprint
Published:	2026
Subjects:	Machine Learning
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2605.05062