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Full-chip CMP modelling based on Fully Convolutional Network leveraging White Light Interferometry

Fuente: arXiv

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Dettagli Bibliografici
Autori principali:	Exbrayat, Jules, Bouis, Renan, Sezestre, Elie, Balan, Viorel, Cornelis, Arnaud, Hebras, Damien, Euvrard, Catherine
Natura:	Preprint
Pubblicazione:	2026
Soggetti:	Machine Learning
Accesso online:	Acceder al recurso
Tags:	Aggiungi Tag Nessun Tag, puoi essere il primo ad aggiungerne!!

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