Full-chip CMP modelling based on Fully Convolutional Network leveraging White Light Interferometry
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arXiv
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| Main Authors: | Exbrayat, Jules, Bouis, Renan, Sezestre, Elie, Balan, Viorel, Cornelis, Arnaud, Hebras, Damien, Euvrard, Catherine |
|---|---|
| Format: | Preprint |
| Published: |
2026
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