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Active Edge Silicon Sensors Fabricated With Edge Ion Implantation and Microwave Annealing for Dopant Activation

Fuente: arXiv

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Bibliographic Details
Main Authors:	Gentry, Andrew, Segal, Julie, Kok, Angela, Kenney, Christopher, Seidel, Sally
Format:	Preprint
Published:	2026
Subjects:	Instrumentation and Detectors
Online Access:	Acceder al recurso
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